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J-GLOBAL ID:201702248126656496   Reference number:17A1004729

A Study on Beam Configuration of MEMS Capacitive Accelerometers Fabricated using SOI-MEMS Technologies

SOI-MEMS技術による静電容量式MEMS加速度センサ
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Volume: 137  Issue:Page: 247-251(J-STAGE)  Publication year: 2017 
JST Material Number: L3098A  ISSN: 1341-8939  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Measuring methods and instruments of time,speed,acceleration,angular veloc?  ,  Measuring methods and instruments of R,L,C,Q, and dielectric constant  ,  Manufacturing technology of solid-state devices 
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