Art

J-GLOBAL ID：201702248126656496   Reference number：17A1004729

A Study on Beam Configuration of MEMS Capacitive Accelerometers Fabricated using SOI-MEMS Technologies

SOI-MEMS技術による静電容量式MEMS加速度センサ

Author (2)： Jiannan Liu (千葉工業大学) ,  MURO HIDEO (千葉工業大学)
Material： 電気学会論文誌 E  (IEEJ Transactions on Sensors and Micromachines)
Volume： 137  Issue： 8  Page： 247-251(J-STAGE)  Publication year： 2017 
JST Material Number： L3098A  ISSN： 1341-8939  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： *SOI structure ,  *MEMS ,  *electrostatic capacity ,  *accelerometer ,  *speed sensor ,  electrode ,  sensitivity (ratio) ,  resonance frequency ,  simulation ,  inertial mass ,  scanning electron microscope ,  electron microscopy ,  Capacitance sensor ,  *acceleration sensor ,  MEMS accelerometer
Semi thesaurus term： comb-type electrode

Author keywords (8)： 加速度センサ ,  静電容量櫛型電極 ,  感度 ,  共振周波数 ,  accelerometer ,  capacitive beam configuration ,  sensitivity ,  resonant frequency

JST classification (3)： Measuring methods and instruments of time,speed,acceleration,angular veloc?  (AD05040K) ,  Measuring methods and instruments of R,L,C,Q, and dielectric constant  (AD07030N) ,  Manufacturing technology of solid-state devices  (NC03030V)

Reference (10)：

• (1) C. Sun, M. Tsai, Y. Liu, and W. Fang : “Implementation of a Monolithic Single Proof-Mass Tri-Axis Accelerometer Using CMOS-MEMS Technique”, IEEE Trans. on Electron Devices, Vol. 57, pp. 1670-1679 (2010)
• (2) Y. Wang and P. Chan : “A Low-Power Highly Sensitive Capacitive Accelerometer IC Using Auto-Zero Time-Multiplexed Differential Technique”, IEEE Sensors Journal, Vol. 15, pp. 6179-6189 (2015)
• (3) C. Yeh and K. Najafi: “CMOS Interface Circuitry for a Low-Voltage Micromachined Tunneling Accelerometer”, Journal of Microelectromechanical Systems, Vol. 7, pp. 6-15 (1998)
• (4) K. Ishihara, C. F. Yung, A. A. Ayon, and M. A. Schmidt : “An Inertial Sensor Technology Using DRIE and Wafer Bonding with Interconnecting Capability”, IEEE Journal of Microelectromechanical Systems, Vol. 8, pp. 403-408 (1999)
• (5) F. A. Hassania, A. F. Payamb, M. Fathipourc, and F. Farbizd : “An Adaptive Nonlinear Estimator for the MEMS Capacitive Accelerometer Based on Adaptive Input-Output Feedback Linearization”, ISDRS 2007, College Park, MD, USA (2007)

Terms in the title (2)： 静電容量 ,  MEMS加速度センサ