Art
J-GLOBAL ID：201702257208412593   Reference number：17A1036876

Plane-view transmission electron microscopy of Si/GaAs interfaces fabricated by surface-activated bonding at room temperature

室温での表面活性化ボンディングにより作製したSi/GaAs界面の平面透過型電子顕微鏡観察【Powered by NICT】
Author (5)：
Ohno Yutaka

About Ohno Yutaka

(Institute for Materials Research (IMR), Tohoku University, Katahira 2-1-1, Aoba, Sendai 980-8577, Japan)

About Institute for Materials Research (IMR), Tohoku University, Katahira 2-1-1, Aoba, Sendai 980-8577, Japan

, 
Yoshida Hideto

About Yoshida Hideto

(The Institute of Scientific and Industrial Research (ISIR), Osaka University, Mihogaoka 8-1, Ibaraki, Osaka 567-0047, Japan)

About The Institute of Scientific and Industrial Research (ISIR), Osaka University, Mihogaoka 8-1, Ibaraki, Osaka 567-0047, Japan

, 
Takeda Seiji

About Takeda Seiji

(The Institute of Scientific and Industrial Research (ISIR), Osaka University, Mihogaoka 8-1, Ibaraki, Osaka 567-0047, Japan)

About The Institute of Scientific and Industrial Research (ISIR), Osaka University, Mihogaoka 8-1, Ibaraki, Osaka 567-0047, Japan

, 
Jianbo Liang

About Jianbo Liang

(Graduate School of Engineering, Osaka-City University, Sugimoto 3-3-138, Sumiyoshi, Osaka 558-8585, Japan)

About Graduate School of Engineering, Osaka-City University, Sugimoto 3-3-138, Sumiyoshi, Osaka 558-8585, Japan

, 
Shigekawa Naoteru

About Shigekawa Naoteru

(Graduate School of Engineering, Osaka-City University, Sugimoto 3-3-138, Sumiyoshi, Osaka 558-8585, Japan)

About Graduate School of Engineering, Osaka-City University, Sugimoto 3-3-138, Sumiyoshi, Osaka 558-8585, Japan


Material：
IEEE Conference Proceedings  (IEEE Conf Proc)

About IEEE Conference Proceedings


Volume： 2017  Issue： LTB-3D  Page： 4  Publication year： 2017 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Abstract/Point：
Abstract/Point
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Si/GaAs interfaces fabricated ...
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Thesaurus term：
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*silicon

About silicon

, 
*transmission electron microscope

About transmission electron microscope

, 
*gallium arsenide

About gallium arsenide

, 
surface defect

About surface defect

, 
*interface(surface)

About interface(surface)


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
GaAs基板

About GaAs基板

, 
界面抵抗

About 界面抵抗

, 
*透過型電子顕微鏡法

About 透過型電子顕微鏡法

, 
*表面活性化

About 表面活性化

, 【Automatic Indexing@JST】
JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

Terms in the title (8)：
Terms in the title
Keywords automatically extracted from the title.
室温

About 室温

, 
表面活性化

About 表面活性化

, 
ボンディング

About ボンディング

, 
作製

About 作製

, 
Si

About Si

, 
GaAs

About GaAs

, 
界面

About 界面

, 
透過型電子顕微鏡観察

About 透過型電子顕微鏡観察


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