Conductivity control of Sn-doped α-Ga<sub>2</sub>O<sub>3</sub> thin films grown on sapphire substrates

AKAIWA Kazuaki; AKAIWA Kazuaki; KANEKO Kentaro; ICHINO Kunio; FUJITA Shizuo

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J-GLOBAL ID：201702275336284274 Reference number：17A0848463

Conductivity control of Sn-doped α-Ga₂O₃ thin films grown on sapphire substrates

サファイア基板上に成長したSnドープα-Ga₂O₃薄膜の導電率制御

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Volume： 55 Issue： 12 Page： 1202BA.1-1202BA.8 Publication year： Dec. 2016
JST Material Number： G0520B ISSN： 0021-4922 CODEN： JJAPB6 Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Oxide thin films , Electric conduction in other inorganic compounds

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Conductivity control of Sn-doped α-Ga2O3 thin films grown on sapphire substrates

Conductivity control of Sn-doped α-Ga₂O₃ thin films grown on sapphire substrates