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J-GLOBAL ID:201702286882171609   Reference number:17A1810907

Effect of ion-beam irradiation on the epitaxial growth of graphene via the SiC surface decomposition method

SiCの表面分解法によるグラフェンのエピタキシャル成長に対するイオンビーム照射の効果
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Volume: 56  Issue:Page: 085104.1-085104.4  Publication year: Aug. 2017 
JST Material Number: G0520B  ISSN: 0021-4922  CODEN: JJAPB6  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Techniques and equipment of thin film deposition  ,  Carbon and its compounds  ,  Applications of electron beams and ion beams 
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