Art

J-GLOBAL ID：201802234509367238   Reference number：18A1330589

Energy band structure and electrical properties of Ga-oxide/GaN interface formed by remote oxygen plasma

リモート酸素プラズマを用いて形成されたGa酸化物/GaN界面のエネルギーバンド構造と電気特性

Author (16)： YAMAMOTO Taishi (Nagoya Univ., Nagoya, JPN) ,  YAMAMOTO Taishi (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya, JPN) ,  TAOKA Noriyuki (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya, JPN) ,  OHTA Akio (Nagoya Univ., Nagoya, JPN) ,  TRUYEN Nguyen Xuan (Nagoya Univ., Nagoya, JPN) ,  TRUYEN Nguyen Xuan (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya, JPN) ,  YAMADA Hisashi (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya, JPN) ,  TAKAHASHI Tokio (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya, JPN) ,  IKEDA Mitsuhisa (Nagoya Univ., Nagoya, JPN) ,  MAKIHARA Katsunori (Nagoya Univ., Nagoya, JPN) ,  NAKATSUKA Osamu (Nagoya Univ., Nagoya, JPN) ,  SHIMIZU Mitsuaki (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya, JPN) ,  SHIMIZU Mitsuaki (Nagoya Univ. Inst. of Materials and Systems for Sustainability (IMaSS), Nagoya, JPN) ,  MIYAZAKI Seiichi (Nagoya Univ., Nagoya, JPN) ,  MIYAZAKI Seiichi (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya, JPN) ,  MIYAZAKI Seiichi (Nagoya Univ. Inst. of Materials and Systems for Sustainability (IMaSS), Nagoya, JPN)
Material： Japanese Journal of Applied Physics  (JJAP)
Volume： 57  Issue： 6S3  Page： 06KA05.1-06KA05.5  Publication year： Jun. 2018 
JST Material Number： G0520B  ISSN： 0021-4922  CODEN： JJAPB6  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *plasma production ,  *plasma ,  *gallium oxide ,  *gallium nitride ,  *interface (surface) ,  *band structure ,  X-ray photoelectron spectroscopy ,  binding energy ,  capacitance-voltage characteristic ,  electric charge ,  *oxygen plasma ,  surface band structure ,  fixed charge ,  *remote plasma
Semi thesaurus term： *remote plasma

JST classification (2)： Oxide thin films  (BK14050P) ,  Electrical properties of interfaces in general  (BM03081H)

Reference (30)：

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Terms in the title (7)： 酸素プラズマ ,  Ga酸化物 ,  GaN ,  界面 ,  エネルギー ,  バンド構造 ,  電気特性