Art

J-GLOBAL ID：201802287517247537   Reference number：18A1010989

Influence of deposition conditions on self-assembled growth of Pb(Zr,Ti)O₃ nanorods by pulsed laser deposition at elevated oxygen pressure

高酸素圧でのパルスレーザ蒸着によるPb(Zr,Ti)O₃ナノロッドの自己集合成長に及ぼす蒸着条件の影響

Author (7)： OKAMOTO Kazuki (Department of Energy Engineering, Nagoya University) ,  YAMADA Tomoaki (Department of Energy Engineering, Nagoya University) ,  YAMADA Tomoaki (PRESTO, Japan Science and Technology Agency) ,  YASUMOTO Jun (Department of Energy Engineering, Nagoya University) ,  NAKAMURA Kentaro (Department of Energy Engineering, Nagoya University) ,  YOSHINO Masahito (Department of Energy Engineering, Nagoya University) ,  NAGASAKI Takanori (Department of Energy Engineering, Nagoya University)
Material： Journal of the Ceramic Society of Japan (Web)  (J Ceram Soc Jpn (Web))
Volume： 126  Issue： 5  Page： 276-280(J-STAGE)  Publication year： 2018 
JST Material Number： U0409A  ISSN： 1348-6535  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *thin film growth ,  *dielectric thin film ,  ferroelectrics ,  *lead zirconate titanate ,  nanorod ,  pulsed laser deposition ,  substrate temperature ,  distance ,  Partial Pressure ,  self assembly ,  *micro structure ,  crystal structure ,  surface diffusion ,  shadow effect ,  response ,  composition dependence ,  distance dependence ,  oxyecoia partial pressure ,  shadowing ,  piezoelectric response
Semi thesaurus term： PZT ,  microstructure ,  size distribution

Author keywords (5)： PZT ,  Nano rods ,  Self-assembled growth ,  Piezoelectricity ,  Ferroelectricity

JST classification (1)： Oxide thin films  (BK14050P)

Reference (21)：

• 1) P. Muralt, J. Micromech. Microeng., 10, 136–146 (2000).
• 2) S. Trolier-McKinstry and P. Muralt, J. Electroceram., 12, 7–17 (2004).
• 3) N. Setter, D. Damjanovic, L. Eng, G. Fox, S. Gevorgian, S. Hong, A. Kingon, H. Kohlstedt, N. Y. Park, G. B. Stephenson, I. Stolitchnov, A. K. Taganstev, D. V. Taylar, T. Yamada and S. Streiffer, J. Appl. Phys., 100, 051606 (2006).
• 4) C.-B. Eom and S. Trolier-McKinstry, MRS Bull., 37, 1007–1017 (2012).
• 5) H. Funakubo, M. Dekkers, A. Sambri, S. Gariglio, I. Shklyarevskiy and G. Rijnders, MRS Bull., 37, 1030–1038 (2012).

Terms in the title (10)： 酸素圧 ,  パルスレーザ蒸着 ,  Pb ,  Zr ,  Ti ,  O3 ,  ナノロッド ,  自己集合 ,  成長 ,  蒸着