Art

J-GLOBAL ID：201902220163302984   Reference number：19A0329555

Formation of diamond-like carbon film using high-power impulse magnetron sputtering

高出力インパルスマグネトロンスパッタリングを用いたダイヤモンド状炭素膜の形成【JST・京大機械翻訳】

Author (4)： Iga Kazunori (Department of Electrical and Electronic Engineering, Meijo University, 1-501, Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan) ,  Oda Akinori (Department of Electrical and Electronic Engineering, Chiba Institute of Technology, 2-17-1 Tsudanuma, Narashino 275-0016, Japan) ,  Kousaka Hiroyuki (Department of Mechanical Engineering, Gifu University, 1-1 Yanagido, Gifu 501-1193, Japan) ,  Ohta Takayuki (Department of Electrical and Electronic Engineering, Meijo University, 1-501, Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan)
Material： Thin Solid Films
Volume： 672  Page： 104-108  Publication year： 2019 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： In this study, a diamond-like ...

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Thesaurus term： mass spectrometry ,  *Carbon ,  *magnetron sputtering ,  distribution function ,  quality ,  DLC film ,  tribology ,  friction coefficient ,  voltage ,  abrasion resistance ,  *diamond-like carbon ,  applied voltage ,  deposition rate ,  ion energy ,  *high power output ,  mechanical property ,  resistance (endure)

Author keywords (4)： Diamond like carbon film ,  High power impulse magnetron sputtering ,  Energy-resolved mass spectrometry ,  Tribology

JST classification (1)： Thin films of other inorganic compounds  (BK14060A)

Terms in the title (4)： 高出力 ,  インパルス ,  マグネトロンスパッタリング ,  ダイヤモンド状炭素