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J-GLOBAL ID：201902224392787962   Reference number：19A0801988

Ternary Ti-Si-C alloy film formation on GaN and contact properties

GaN上の三元Ti-Si-C合金膜形成と接触特性【JST・京大機械翻訳】
Author (3)：
Takahashi Y.

About Takahashi Y.

(Joining and Welding Research Institute, Osaka University, Japan)

About Joining and Welding Research Institute, Osaka University, Japan

, 
Arai M.

About Arai M.

(Joining and Welding Research Institute, Osaka University, Japan)

About Joining and Welding Research Institute, Osaka University, Japan

, 
Maeda M.

About Maeda M.

(Dept. of Mechanical Eng., Nihon University, Japan)

About Dept. of Mechanical Eng., Nihon University, Japan


Material：
Ceramics International  (Ceram Int)

About Ceramics International


Volume： 45  Issue： 7 PA  Page： 9359-9362  Publication year： 2019 
JST Material Number： H0705A  ISSN： 0272-8842  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Abstract/Point：
Abstract/Point
Japanese summary of the article(about several hundred characters).
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Ternary Ti-Si-C alloy films we...
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Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
electrical property

About electrical property

, 
micro structure

About micro structure

, 
substrate (plate)

About substrate (plate)

, 
X-ray diffractometry

About X-ray diffractometry

, 
transmission electron microscope

About transmission electron microscope

, 
annealing (heat treatment)

About annealing (heat treatment)

, 
thin film

About thin film

, 
X-Ray Diffraction

About X-Ray Diffraction

, 
chemical composition

About chemical composition

, 
*gallium nitride

About gallium nitride

, 
electron microscopy

About electron microscopy

, 
ohmic contact

About ohmic contact

, 
*alloy

About alloy

, 
titanium nitride

About titanium nitride

, 
*film deposition

About film deposition


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
RFマグネトロンスパッタリング

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, 【Automatic Indexing@JST】
Author keywords (5)：
Compound semiconductors

About Compound semiconductors

, 
GaN

About GaN

, 
Thin film

About Thin film

, 
Contact properties

About Contact properties

, 
Ohmic contact

About Ohmic contact

JST classification (1)：
JST classification
Category name(code) classified by JST.
Properties of ceramics and ceramic whiteware 
(YC03030G)

About Properties of ceramics and ceramic whiteware

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
GaN

About GaN

, 
Ti

About Ti

, 
Si

About Si

, 
膜形成

About 膜形成


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