Art

J-GLOBAL ID：201902237723929695   Reference number：19A1200186

Growth characteristics of ZnO thin films produced via catalytic reaction-assisted chemical vapor deposition

触媒反応支援化学蒸着により作製したZnO薄膜の成長特性【JST・京大機械翻訳】

Author (5)： Saito Taro (Department of Electrical, Electronics and Information Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan) ,  Iba Ryuta (Department of Electrical, Electronics and Information Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan) ,  Ono Shotaro (Department of Electrical, Electronics and Information Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan) ,  Imada Go (Department of Engineering, Niigata Institute of Technology, 1719 Hujihashi, Kashiwazaki, Niigata 945-1195, Japan) ,  Yasui Kanji (Department of Electrical, Electronics and Information Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan)
Material： Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)
Volume： 37  Issue： 3  Page： 030904-030904-3  Publication year： 2019 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： The growth characteristics of ...

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Thesaurus term： pulse duration ,  pulsation (signal) ,  *chemical vapor deposition ,  pulse ,  *catalyst ,  rate of sedimentation ,  zinc oxide ,  light-emitting device ,  ZnO film
Semi thesaurus term： 高エネルギー , 【Automatic Indexing@JST】

JST classification (2)： Oxide thin films  (BK14050P) ,  Metallic thin films  (BK14030T)

Terms in the title (6)： 触媒反応 ,  支援 ,  化学蒸着 ,  作製 ,  ZnO薄膜 ,  成長特性