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J-GLOBAL ID:202002227400665802   Reference number:20A0844756

Real Time Nanoscale Observation in Cleaning Phenomena by Evanescent Field-2nd: Non-contact Removal of Abrasive Nano-particles during Enforcing Mega Sonic-

エバネッセント光を応用した超微粒子洗浄現象の実時間観察に関する研究-第2報:非接触洗浄時における超音波と研磨ナノ粒子の除去挙動-
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Volume: 2020  Issue: 春季(CD-ROM)  Page: ROMBUNNO.H51  Publication year: Mar. 01, 2020 
JST Material Number: Y0914A  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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