Art
J-GLOBAL ID：202002260407087790   Reference number：20A0763579

Top-emission organic light emitting diode with indium tin oxide top-electrode films deposited by a low-damage facing-target type sputtering method

低損傷対向ターゲット型スパッタリング法により堆積した酸化インジウムすず上部電極膜を持つトップ発光有機発光ダイオード【JST・京大機械翻訳】
Author (4)：
Yasuda Yoji

About Yasuda Yoji

(Department of Electronics and Mechatronics, Tokyo Polytechnic University, 1853 Iiyama, Atsugi, Kanagawa 243-0297, Japan)

About Department of Electronics and Mechatronics, Tokyo Polytechnic University, 1853 Iiyama, Atsugi, Kanagawa 243-0297, Japan

, 
Kobayashi Shin-ichi

About Kobayashi Shin-ichi

(Department of Electronics and Mechatronics, Tokyo Polytechnic University, 1853 Iiyama, Atsugi, Kanagawa 243-0297, Japan)

About Department of Electronics and Mechatronics, Tokyo Polytechnic University, 1853 Iiyama, Atsugi, Kanagawa 243-0297, Japan

, 
Uchida Takayuki

About Uchida Takayuki

(Department of Media and Image Technology, Tokyo Polytechnic University, 1853 Iiyama, Atsugi, Kanagawa 243-0297, Japan)

About Department of Media and Image Technology, Tokyo Polytechnic University, 1853 Iiyama, Atsugi, Kanagawa 243-0297, Japan

, 
Hoshi Yoichi

About Hoshi Yoichi

(Department of Electronics and Mechatronics, Tokyo Polytechnic University, 1853 Iiyama, Atsugi, Kanagawa 243-0297, Japan)

About Department of Electronics and Mechatronics, Tokyo Polytechnic University, 1853 Iiyama, Atsugi, Kanagawa 243-0297, Japan


Material：
Thin Solid Films

About Thin Solid Films


Volume： 698  Page： Null  Publication year： 2020 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Abstract/Point：
Abstract/Point
Japanese summary of the article(about several hundred characters).
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Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
laminate structure

About laminate structure

, 
effectiveness

About effectiveness

, 
sputtering

About sputtering

, 
*indium tin oxide

About indium tin oxide

, 
*sputtered deposition

About sputtered deposition

, 
evaporation

About evaporation

, 
oxide

About oxide

, 
*light emission

About light emission

, 
annealing(heat treatment)

About annealing(heat treatment)


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
動作電圧

About 動作電圧

, 
有機層

About 有機層

, 
*有機EL素子

About 有機EL素子

, 【Automatic Indexing@JST】
Author keywords (3)：
Top emission organic light emitting diodes

About Top emission organic light emitting diodes

, 
Low-damage sputtering

About Low-damage sputtering

, 
Annealing treatment

About Annealing treatment

JST classification (1)：
JST classification
Category name(code) classified by JST.
Light emitting devices 
(NC03082G)

About Light emitting devices

Terms in the title (8)：
Terms in the title
Keywords automatically extracted from the title.
損傷

About 損傷

, 
ターゲット

About ターゲット

, 
スパッタリング法

About スパッタリング法

, 
堆積

About 堆積

, 
酸化インジウムすず

About 酸化インジウムすず

, 
上部電極

About 上部電極

, 
トップ

About トップ

, 
有機発光ダイオード

About 有機発光ダイオード


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