Art

J-GLOBAL ID：202102233311887401   Reference number：21A0221933

Modification of copper and copper oxide surface states due to isopropyl alcohol treatment toward area-selective processes

面積選択的プロセスに向けたイソプロピルアルコール処理による銅および酸化銅表面状態の修飾【JST・京大機械翻訳】

Author (11)： Mawaki Takezo (Graduate School of Engineering, Tohoku University, 6-6-11 Aza-Aoba, Aramaki, Aoba-ku, Sendai, 980-8579, Japan) ,  Teramoto Akinobu (Hiroshima University, Research Institute for Nanodevice and Bio Systems, 1-4-2 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8527, Japan) ,  Ishii Katsutoshi (Tokyo Electron Technology Solutions Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki, Yamanashi 407-0192, Japan) ,  Shiba Yoshinobu (New Industry Creation Hatchery Center, Tohoku University, 6-6-10 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan) ,  Kuroda Rihito (Graduate School of Engineering, Tohoku University, 6-6-11 Aza-Aoba, Aramaki, Aoba-ku, Sendai, 980-8579, Japan) ,  Suwa Tomoyuki (New Industry Creation Hatchery Center, Tohoku University, 6-6-10 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan) ,  Azumo Shuji (Tokyo Electron Technology Solutions Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki, Yamanashi 407-0192, Japan) ,  Shimizu Akira (Tokyo Electron Technology Solutions Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki, Yamanashi 407-0192, Japan) ,  Umezawa Kota (Tokyo Electron Technology Solutions Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki, Yamanashi 407-0192, Japan) ,  Shirai Yasuyuki (New Industry Creation Hatchery Center, Tohoku University, 6-6-10 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan) ,  Sugawa Shigetoshi (New Industry Creation Hatchery Center, Tohoku University, 6-6-10 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan)
Material： Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)
Volume： 39  Issue： 1  Page： 013403-013403-10  Publication year： 2021 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： The reduction of copper oxide ...

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Thesaurus term： *Copper ,  *copper oxide ,  chemical reactor ,  X-ray photoelectron spectroscopy ,  surface modification ,  FTIR spectroscopy ,  chemical constitution ,  hydrogen reduction ,  adsorption property ,  natural oxide film ,  aliphatic alcohol

JST classification (2)： Metallic thin films  (BK14030T) ,  Study of adsorption by physical means  (CB12043P)

Substance index (1)： 2-Propanol

Terms in the title (6)： 面積 ,  プロセス ,  イソプロピルアルコール ,  銅 ,  酸化銅 ,  修飾