研究者

J-GLOBAL ID：200901044967811926 更新日: 2022年08月18日

昌原明植

マサハラメイショク | Masahara Meishoku

所属機関・部署：
ホームページURL (1件)： http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=M87606217
MISC (32件)：

YX Liu, E Sugimata, K Ishii, M Masahara, K Endo, T Matsukawa, H Yamauchi, S O'uchi, E Suzuki. Experimental study of effective carrier mobility of multi-fin-type double-gate metal-oxide-semiconductor field-effect transistors with (111) channel surface fabricated by orientation-dependent wet etching. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS. 2006. 45. 4B. 3084-3087
K Endo, S Noda, M Masahara, T Kubota, T Ozaki, SJ Samukawa, YX Liu, K Ishii, Y Ishikawa, E Sugimata, et al. Fabrication of a vertical-channel double-gate metal-oxide-semiconductor field-effect transistor using a neutral beam etching. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS. 2006. 45. 8-11. L279-L281
M Masahara, YX Liu, K Endo, T Matsukawa, K Sakamoto, K Ishii, S O'uchi, E Sugimata, H Yamauchi, E Suzuki. Fabrication and characterization of vertical-type double-gate metal-oxide-semiconductor field-effect transistor with ultrathin Si channel and self-aligned source and drain. APPLIED PHYSICS LETTERS. 2006. 88. 7. 0721031-0721033
Vertical ultrathin-channel multi-gate MOSFETs (MuGFETs):Technological challenges and future developments. IEEJ Transactions on Electrical and Electronics Engineering. 2006
昌原明植, 柳永〓, 遠藤和彦, 松川貴, 鈴木英一. 縦型ダブルゲートMOSFETデバイス技術. 電気学会誌. 2006. 126. 6. 702-707

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