STRUCTURAL INVESTIGATION OF PIEZOELECTRIC LAYER AND ELECTRODE LAYER FOR CIRCULAR PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS
(Asia-Paci?c Conference of Transducers and Micro-Nano Technology 2016 (APCOT 2016) 2016)
UNDERWATER OBSERVATION OF VIBRATION BEHAVIOR OF THE MINIATURE CIRCULAR PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS
(IEEE Sensors 2015 2015)
Sensitivity and resonance frequency with changing the diaphragm diameter of piezoelectric micromachined ultrasonic transducers
(THE IRAGO CONFERENCE 2015 2015)