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講演・口頭発表等 (20件)
-
Principle and Basic Characteristics of a New Optical MEMS Switch Using a Belt-Shaped Thin Film Mirror
(2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2009) 2009) -
Driving Characteristic of an Optical MEMS Switch Using a Belt-Shaped Thin Film Mirror and a High Dielectric Constant Layer
(2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2009) 2009) -
Fabrication Process Improvement of Optical MEMS Switch Using a Belt-shaped Thin Film Mirror
(3rd International Conference of Asian Symposium for Precision Engineering and Nanotechnology 2009) -
Principle and Basic Characteristics of a New Optical MEMS Switch Using a Belt-Shaped Thin Film Mirror
(2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2009) 2009) -
Driving Characteristic of an Optical MEMS Switch Using a Belt-Shaped Thin Film Mirror and a High Dielectric Constant Layer
(2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2009) 2009) -
Fabrication Process Improvement of Optical MEMS Switch Using a Belt-shaped Thin Film Mirror
(3rd International Conference of Asian Symposium for Precision Engineering and Nanotechnology 2009) -
帯状薄膜ミラーを利用したMEMS光スイッチの製作・組立法
(2008年度精密工学会春季大会学術講演会 2008) -
A Fabrication Method of a MEMS Optical Switch Using Belt-shaped Thin Film Mirror
(2008) -
帯状薄膜ミラーと高誘電体膜を利用したMEMS光スイッチ
(2007年度精密工学会春季大会学術講演会 2007) -
液体の表面張力を利用したマイクロ部品のセルフアライメント -接着剤を用いたセルフアライメントと部品の固定-
(2006年度精密工学会春季大会 2006) -
帯状薄膜ミラーを利用したMEMS光スイッチ-基板間ギャップ縮小による特性改善-
(2006年度精密工学会秋季大会 2006) -
Self-Alignment and Bonding of Microparts Using Liquid Surface Tension
(2nd International Conference on Positioning Technology 2006) -
A MEMS Optical Switch Using a Belt-shaped Thin Film Mirror - An Improvement of Characteristic by Reduction of Gap Width between Substrates -
(2006) -
Self-Alignment and Bonding of Microparts Using Liquid Surface Tension
(2nd International Conference on Positioning Technology 2006) -
薄膜ミラーの変形を利用した光スイッチの動特性
(2005年度精密工学会秋季大会 2005) -
Characteristics of Ti-12.7Ni-35.3Pd High-Temperature Shape Memory Alloy Thin Films
(The 4th Pacific Rim International Conference on Advanced Materials and Processing (PRICM-4) 2001) -
Shape Memory Behavior of Sputter-Deposited Ti-Ni-Pd Thin Films
(The 4th Pacific Rim International Conference on Advanced Materials and Processing (PRICM-4) 2001) -
Characteristics of Ti-12.7Ni-35.3Pd High-Temperature Shape Memory Alloy Thin Films
(The 4th Pacific Rim International Conference on Advanced Materials and Processing (PRICM-4) 2001) -
Shape Memory Behavior of Sputter-Deposited Ti-Ni-Pd Thin Films
(The 4th Pacific Rim International Conference on Advanced Materials and Processing (PRICM-4) 2001) -
Ti-Ni形状記憶合金の格子定数およびマルテンサイト変態に及ぼすNi濃度の効果
(1999年日本金属学会春季大会 1999)
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