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文献
J-GLOBAL ID：201102278053639311
整理番号：11A1123541 狭ギャッププロセスを利用した単結晶シリコンマイクロエレクトロメカニカルシステム共振器の評価
Evaluation of a Single-Crystal-Silicon Microelectromechanical Systems Resonator Utilizing a Narrow Gap Process
クリップ引用文献 (22件)
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