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文献
J-GLOBAL ID：201202231856621617
整理番号：12A0543017 多層コーティング法におけるBNスパッタリング特性について
Sputtering Characteristic of BN in Multilayer Coating Method
クリップ引用文献 (12件)
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- 4) S. YOKOTA, FUKUSHIMA, R. TSUKIZAKI, K. KOMURASAKI, Y. ARAKAWA, A. KOBAYASHI, Development of Hall Thruster Life Time Measurement Method Using Multilayer Coated Chip, Plasma Application and Hybrid Functionally Materials Vol.17, 2008.
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- 9) Rubin B, Topper JL, Yalin AP, Total and Differential sputter yields of boron nitride measured by quartz crystal microbalance, Journal of Physics D: Applied Physics 2009;42(No.205025).
- 10) Vladimir V. Abashkin, Oleg A. Gorshkov, Alexander S. Lovtsov, Andrey A. Shagaida, Analysis of Ceramic Erosion Characteristic in Hall-Effect Thruster with Higher Specific Impulse, IEPC-2007-133.
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