文献
J-GLOBAL ID:201302288953853580
整理番号:13A1896643 超精密ステージにおける非線形性と軸間干渉を有する回転運動の干渉解析
Interference Analysis of Rotational Motion for High-precision Stage Considering Nonlinearity and Coupling
- H. Butler,“Adaptive Feedforward for a Wafer Stage in a Lithographic Tool,” IEEE Trans. on Control Systems Technology, vol. 21, no. 3, pp. 875-881, 2013.
- S. Ozawa, “The Current Lithography Technologies of the LCD Exposure System,” IEICE Trans. C, vol. J84-C, no. 12, pp. 1227-1231, 2001. (in Japanese)
- K. Sakata, H. Fujimoto, T. Ohtomo, and K. Saiki, “Auto Focus and Leveling Control of Large-Scale High-Precision Scan-Stage Using Driving Force and Surface Shape of the Stage,” Trans. IEE of Japan. IA, vol. 129, no. 6, pp. 564-570, 2009. (in Japanese)
- T. Oomen, R. van Herpen, S. Quist, M. van de Wal, O. Bosgra, and M. Steinbuch, “Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage,” IEEE Trans. Control Systems Technology, no. 99, pp. 1-17, 2013.
- W. Kim, T. Hu, and N. D. Bhat: “Design and control of a 6-DOF high-precision integrated positioner,” Proc. American Control Conference, Vol. 3, pp. 2493-2498, 2004.
- M. Heertjes, D. Hennekens, and M. Steinbuch,“MIMO feed-forward design in wafer scanners using a gradient approximation-based algorithm,” Control Engineering Practice, vol. 18, no. 5, pp. 495-506, 2010.
- K. Sakata, H. Fujimoto, A. Hara, T. Ohtomo, and K. Saiki, “Design fabrication and control of 4-DOF high-precision stage,” in Proc. The 11th International Workshop on Advanced Motion Control (AMC'10), pp. 366-370, 2010.
- 姿勢制御研究委員会:「人工衛星の力学と制御ハンドブック:基礎理論から応用技術まで」,培風館,2007.
- R. M. Murray, Z. Li and S. S. Sastry, “A Mathematical Introduction to Robotic Manipulation,” CEC Press, 1994.
- W. Ohnishi, H. Fujimoto, Y. Hori, K. Sakata, K. Suzuki and K. Saiki, “Proposal of Attitude Control for High-Precision Stage by Compensating Nonlinearity and Coupling of Euler's Equation,” IEE of Japan Technical Meeting Record, IIC-13-101, MEC-13-101, pp.67-72, 2013. (in Japanese)
- 梶田秀司:「ヒューマノイドロボット」,オーム社,2005.
- I. Yamaguchi, T. Kida, O. Okamoto, and Y. Ookami, “Quaternion and Euler Angles in Kinematics,” Technical Memorandum of National Aerospace Laboratory, vol. 636, pp. 1-15, 1991. (in Japanese)
- S. Burak, “Trajectory Generation for CNC Machine Tools,” Journal of JSPE, vol. 79, pp. 631-638, 2013.
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