文献
J-GLOBAL ID:201802284081480023
整理番号:18A1183469 横方向に振動する伸長モードを持つシリコン5MHz p-nダイオードアクチュエータの評価
Evaluation of a silicon 5 MHz p-n diode actuator with a laterally vibrating extensional mode
- M. Rinaldi, C. Zuo, J. V. Spiegel, and G. Piazza, IEEE Trans. Electron Devices 58, 1281 (2011).
- K. Hashimoto, K. Ito, H. Tanigawa, and K. Suzuki, Jpn. J. Appl. Phys. 50, 067201 (2011).
- D. Galayko, A. Kaiser, L. Buchaillot, B. Legrand, D. Collard, and C. Combi, J. Micromech. Microeng. 13, 134 (2003).
- T. Oka, T. Ishino, H. Tanigawa, and K. Suzuki, Jpn. J. Appl. Phys. 50, 06GH02 (2011).
- T. Okamoto, H. Tanigawa, and K. Suzuki, Jpn. J. Appl. Phys. 51, 06FL06 (2012).
- D. Weinstein and S. A. Bhave, IEDM Tech. Dig., 2007, p. 415.
- E. Hwang and S. A. Bhave, IEEE Trans. Electron Devices 58, 2770 (2011).
- J. H. T. Ransley, A. Aziz, C. Durkan, and A. A. Seshia, Appl. Phys. Lett. 92, 184103 (2008).
- J. H. T. Ransley, C. Durkan, and A. A. Seshia, Proc. Conf. Solid-State Sensor, Actuators and Microsystems, 2007, p. 1393.
- K. Kanaya, Y. Nakai, H. Tanigawa, and K. Suzuki, Proc. Int. Conf. Microprocesses and Nanotechnologies, 2014, 6P-7-95.
- Y. Nakai, K. Kanaya, H. Tanigawa, and K. Suzuki, Jpn. J. Appl. Phys. 57, 017201 (2018).
- G. K. Ho, R. Abdolvand, A. Sivapurapu, S. Humad, and F. Ayazi, J. Microelectromech. Syst. 17, 512 (2008).
- V. Kaajakari, T. Mattila, A. Oja, and H. Seppa, J. Microelectromech. Syst. 13, 715 (2004).
- Y. Asahi, H. Tanigawa, T. Nishino, T. Furutsuka, and K. Suzuki, Jpn. J. Appl. Phys. 55, 06GP02 (2016).
- K. Baba, H. Tanigawa, T. Nishino, T. Furutsuka, and K. Suzuki, Proc. Int. Conf. Microprocesses and Nanotechnologies, 2015, 12P-7-107.
- F. Miyazaki, K. Baba, H. Tanigawa, T. Furutsuka, and K. Suzuki, Proc. Int. Conf. Microprocesses and Nanotechnologies, 2017, 9A-9-3.
- S. M. Sze, Physics of Semiconductor Devices (Wiley, New York, 1981) 2nd ed., p. 77.
- Multiphysics Simulation: Special Advertising Section to IEEE Spectrum (June 2012).
- W. Weaver, Jr., S. P. Timoshenko, and D. H. Young, Vibration Problems in Engineering (Wiley, New York, 1990) 5th ed.
- C. Tu and J. E.-Y. Lee, J. Micromech. Microeng. 25, 115020 (2015).
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