Nunomura Shota

ヌノムラショウタ | Nunomura Shota

Affiliation and department：

Research field (4)： Electric/electronic material engineering , Thin-film surfaces and interfaces , Applied plasma science , Basic plasma science

Research keywords (6)： plasma , semiconductor , defects , hydrogen , solar cells , passivation

Research theme for competitive and other funds (6)：

2020 - 2024 Mechanism elucidation of spatio-temporal structure formation of sheath fluctuation using optically trapped fine particles in plasmas
2018 - 2021 Hydrogen-mediated defect passivation of semiconductor materials during plasma processing
2015 - 2018 Generation and annihilation mechanisms of plasma-induced defects on semiconductor surface
2012 - 2015 Transport properties and defect kinetics during silicon thin film growth
2002 - 2005 微粒子プラズマ中の波動と物質創製に関する研究

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Papers (58)：

Kosuke Takenaka, Shota Nunomura, Yuji Hayashi, Hibiki Komatsu, Susumu Toko, Hitoshi Tampo, Yuichi Setsuhara. Stability and gap states of amorphous In-Ga-Zn-Ox thin film transistors: Impact of sputtering configuration and post-annealing on device performance. Thin Solid Films. 2024. 790. 140203-140203
Shota Nunomura, Kunihiro Kamataki, Takehiko Nagai, Tatsuya Misawa, Shinji Kawai, Kosuke Takenaka, Giichiro Uchida, Kazunori Koga. Plasma Synthesis of Silicon Nanoparticles: From Molecules to Clusters and Nanoparticle Growth. IEEE Open Journal of Nanotechnology. 2022. 3. 94-100
Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, et al. Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation. Japanese Journal of Applied Physics. 2019. 58. SE. SE0802
Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, et al. Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development. Japanese Journal of Applied Physics. 2019. 58. SE. SE0804
Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, et al. Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes?. Japanese Journal of Applied Physics. 2019. 58. SE. SE0803

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MISC (4)：

Work history (4)：

2020/04 - 現在 Kyushu University
2012/12 - 2013/12 Univ. Michigan Visiting Scholar
2002/04 - 2003/09 JSPS Research Fellow Max Planck Institute postdoc researcher
1999/06 - 2001/05 JSPS Research Fellow for overseas countries Univ. Iowa postdoc researcher

Committee career (2)：

2020/04 - 現在 APEX/JJAP editor
2018/04 - 現在応用物理学会シリコンテクノロジー分科会委員

Awards (4)：

2021/03 - 応用物理学科会シリコンテクノロジー分科会論文賞
2021/01 - プラズマ材料科学賞奨励部門賞
2019/03 - 応用物理学科会プラズマエレクトロニクス賞
2018/10 - 堀場雅夫賞

Association Membership(s) (3)：

応用物理学会 , AVS , MRS

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