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J-GLOBAL ID：201701015293744791 Update date: Apr. 02, 2025

Matsuda Akifumi

マツダアキフミ | Matsuda Akifumi

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Affiliation and department：
Job title： Associate Professor
Homepage URL (1)： https://matsuda.mat.mac.titech.ac.jp/

Research field (3)： Material fabrication and microstructure control , Thin-film surfaces and interfaces , Inorganic materials

Research keywords (7)： thermal nanoimprint , atomic-scale patterning , green processing , epitaxial growth , nanomaterials , thin films , Functional ceramic materials

Research theme for competitive and other funds (8)：

2020 - 2023 エピタキシャル薄膜を用いた無限構造ニッケル酸塩における異原子価置換効果の解明
2018 - 2019 サブナノスケール形状転写を用いたフレキシブル基板上のエピタキシャル状電子光学素子の創製
2016 - 2019 Fabrication of nano-patterned organic polymer substrates with atomic steps for creation of functional nanostructures
2015 - 2019 Development of wide-bandgap oxide epitaxial thin films by multi-wavelength excimer laser processing and substrates modification
2012 - 2016 Solid-phase crystallization of oxide thin films on nanoscale-controlled substrates via post-annealing under uniaxial compression for exploring the novel functionalities

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Papers (80)：

Kenta Kaneko, Yuchi Qiao, Satoru Kaneko, Momoru Yoshimoto, Akifumi Matsuda. Modification of surface structural and electrical properties of epitaxial NiO (111) films by vacuum-ultraviolet light irradiation. Applied Surface Science. 2025. 689. 162405-162405
Jiayi Tang, Okkyun Seo, Jaemyung Kim, Ibrahima Gueye, L.S.R. Kumara, Ho Jun Oh, Wan-Gil Jung, Won-Jin Moon, Yong Tae Kim, Satoshi Yasuno, et al. Selective phase growth of ultra-smooth Ti2O3 and TiO2 thin films at low growth temperature controlled by the oxygen partial pressure. Applied Surface Science Advances. 2025. 26. 100706-100706
Kenta Kaneko, Yuchi Qiao, Satoru Kaneko, Akifumi Matsuda. Vacuum Ultraviolet-Enhanced Topotactic Phase Transition and Physical Properties at the Surface of Cobalt Oxide Epitaxial Thin Films. The Journal of Physical Chemistry C. 2025. 129. 6. 3264-3271
Daishi Shiojiri, Ryoya Kai, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto. Surface patterning of wide-gap semiconducting β-Ga₂O₃ thin films by area selective crystallization via room-temperature excimer laser annealing and low-toxic wet etching processes. Applied Physics Express. 2025. 18. 1. 015501-015501
Yuchi Qiao, Kenta Kaneko, Itsuki Osawa, Satoru Kaneko, Mamoru Yoshimoto, Akifumi Matsuda. Effect of vacuum-ultraviolet irradiation on structure and resistivity of epitaxial copper oxide thin films. Journal of the Ceramic Society of Japan. 2024. 132. 7. 381-386

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MISC (11)：

金子奈帆, 前田優斗, 大賀友瑛, 林智広, MONDARTE Evan Angelo Quimada, 金子智, 金子智, 松田晃史, 吉本護. Initial growth of calcium phosphate films on nano patterned polymer substrates. 応用物理学会秋季学術講演会講演予稿集(CD-ROM). 2021. 82nd
伊藤翔陽, 難波諒太郎, 三村和仙, 金子智, 金子智, 舟窪浩, 松田晃史, 吉本護. 一軸加圧下熱処理によるBi₂VO_5+δ薄膜の配向性固相結晶化と特性評価. 応用物理学会春季学術講演会講演予稿集(CD-ROM). 2018. 65th
金子智, 金子智, 安原重雄, 佐藤和郎, 安井学, 黒内正仁, 田中聡美, 加藤千尋, 松田晃史, 吉本護. 炭酸ガスによる酸化雰囲気でのグラフェン成長. 応用物理学会秋季学術講演会講演予稿集(CD-ROM). 2017. 78th
Numerical simulation of plasma confinement in DC magnetron sputtering under different magnetic fields and anode structures. 2015. 65. 131-133
松田晃史, 吉本護. 4.ナノインプリント手法によるガラスやポリマー上での単原子レベル極微細パターン形成. Electrochemistry. 2015. 83. 11. 1016-1020

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Books (1)：

ナノインプリント: -次世代微細加工技術の最前線- (エレクトロニクスシリーズ)
シーエムシー出版 2024 ISBN:478131810X

Lectures and oral presentations (247)：

ニッケル酸ランタン薄膜のエピタキシャル成長および還元による酸素欠損型構造の作製
(第85回応用物理学会秋季学術講演会 2024)
機能性酸化物エピタキシャル薄膜の構造・物性に与える真空紫外光励起酸素種の効果
(日本セラミックス協会第37回秋季シンポジウム 2024)
エキシマレーザーアニールによる酸化鉄バッファー層上Ga2O3薄膜の急速固相エピタキシー
(日本セラミックス協会第37回秋季シンポジウム 2024)
Ni1-xFexO薄膜の室温成長およびH2還元によるfcc型Ni1-xFexエピタキシャル薄膜の作製
(第40回日本セラミックス協会関東支部研究発表会 2024)
Fe2O3バッファー層を用いた紫外レーザーアニーリングによるα-Al2O3(0001)基板上Ga2O3薄膜のエピタキシャル固相結晶化
(第71回応用物理学会春季学術講演会 2024)

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Education (4)：

2005 - 2008 Tokyo Institute of Technology Interdisciplinary Graduate School of Science and Engineering Doctoral Course, Department of Innovative and Engineered Materials
2003 - 2005 Tokyo Institute of Technology Interdisciplinary Graduate School of Science and Engineering Master's Course, Department of Innovative and Engineered Materials
2000 - 2003 Tokyo Institute of Technology Faculty of Engineering Department of Inorganic Materials
1999 - 2000 Tokyo Institute of Technology Faculty of Engineering Academic Group 2

Professional career (1)：

博士(工学) (東京工業大学)

Work history (6)：

2024/10 - 現在 Institute of Science Tokyo School of Materials and Chemical Technology Associate Professor
2022/04 - 2024/09 Tokyo Institute of Technology School of Materials and Chemical Technology Associate Professor
2016/04 - 2022/03 Tokyo Institute of Technology Department of Materials Science and Engineering, School of Materials and Chemical Technology Associate Professor
2015/03 - 2016/03 Tokyo Institute of Technology Department of Innovative and Engineered Materials Associate Professor
2011/09 - 2015/02 Tokyo Institute of Technology Department of Innovative and Engineered Materials Assistant Professor

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Committee career (4)：

2023/04 - 現在 The Ceramic Society of Japan Education Committee
2020/04 - 現在 The Ceramic Society of Japan Dissemination and enlightenment committee in Kanto branch
2020/04 - 現在 The Ceramic Society of Japan Board member of Kanto branch
2019/06 - 現在 The Materials Research Society of Japan News editorial board member

Awards (7)：

2018/12 - The Ceramic Society of Japan CerSJ Awards for advancements in ceramic science and technology Room-temperature epitaxial formation of wide-bandgap oxide semiconductor thin films
2016/12 - The Materials Research Society of Japan Award for Encouragement of Research in the 26th Annual Meeting of MRS-J Buffer-induced room-temperature epitaxy of β-Ga2O3 thin films by excimer laser annealing
2016/03 - The Ceramic Society of Japan Ceramic Society of Japan Distinguished Poster Award Phase selective epitaxy of VOX thin films by annealing under uniaxial compression and their conduction property
2014/06 - The Ceramic Society of Japan Award of the Outstanding Reviews Published in the JCerSJ in 2013 Room-temperature synthesis of epitaxial oxide thin films for development of unequilibrium structure and novel electronic functionalization
2013/09 - The Ceramic Society of Japan Ceramic Society of Japan Distinguished Presentation Award Fabrication of magnetic resistance-type structure by hydrogen reduction of multi-layered epitaxial oxide thin films

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Association Membership(s) (6)：

The Materials Research Society of Japan , THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN , Thermoelectrics Society of Japan , Materials Research Society , THE JAPAN SOCIETY OF APPLIED PHYSICS , The Ceramic Society of Japan

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