Optimization of the Electric-Field Emission Type Microplasma Device Based on the Spectroscopic Measurement of Hydrogen-Containing Free Radicals. Scientific Research on Priority Area, "Generation of Micro-Scale Reactive Plasmas and Development of Their New Applications", Summary Report. 2008. 39-42
Fabrication of Hydrogenated Amorphous Silicon Carbide Films from Decomposition of Hexamethyldisilane with Microwave Discharge Flow of Ar
(Dry Process Symposium 2015 2015)
Precursor of N atoms of Hydrogeneated Amorphous Carbon Nitride Films Formed from the Microwave Discharge of C2H2/N2 Gas Mixture
(ISPlamsa 2015 2015)