Motomura Taisei

モトムラタイセイ | Motomura Taisei

Research field (3)： Thin-film surfaces and interfaces , Basic plasma science , Applied plasma science

Research keywords (8)：成膜 , 反応性スパッタリング , 薄膜 , スパッタリング , エッチング , プラズマ応用 , プラズマ , ヘリコンプラズマ

Research theme for competitive and other funds (5)：

2016 - 2019 Development of plasma sputtering device for paramagnetic and low melting point metal target
2014 - 2016 High speed and high aspect ratio reactive ion etching by using high density and ion orbit controlled plasma
2011 - 2015 Active Laser-induced Fluorescence Method using Femtosecond Laser
2013 - 2014 強磁性体ステージを有する高速ヘリコンプラズマエッチング源
2010 - 2011 短軸長の高密度ヘリコンプラズマ源開発と高速プラズマ流制御の先進研究

Papers (36)：

Kenshin Takemura, Taisei Motomura, Wataru Iwasaki, Nobutomo Morita. Fabrication of Highly Active Nanoneedle Gold Electrode Using Rose Petals for Electrochemical Detection of Arsenic(III). ACS Applied Nano Materials. 2023. 6. 17. 15879-15886
Taisei Motomura, Kenshin Takemura, Toshimi Nagase, Nobutomo Morita, Tatsuo Tabaru. Suppression of substrate temperature in DC magnetron sputtering deposition by magnetic mirror-type magnetron cathode. AIP Advances. 2023. 13. 2
Yuichi Kurashima, Taisei Motomura, Shinya Yanagimachi, Takashi Matsumae, Mitsuhiro Watanabe, Hideki Takagi. High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps. Sensors. 2023
Taisei Motomura, Tatsuo Tabaru, Masato Uehara. Substrate temperature dependence of GaN film deposited on sapphire substrate by high-density convergent plasma sputtering device. Journal of Vacuum Science & Technology A. 2022
Kenshin Takemura, Taisei Motomura, Wataru Iwasaki, Naoki Matsuda. Metal deposition and shape reproduction at biological temperatures on cell-level samples. Scientific reports. 2022. 12. 1. 13328-13328

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MISC (44)：

Kurashima Yuichi, Motomura Taisei, Watanabe Mitsuhiro, Yanagimachi Shinya, Matsumae Takashi, Takagi Hideki, Higurashi Eiji. Magnetic circuit design for highly efficient plasma production in a minimal cavity. Proceedings of JSPE Semestrial Meeting. 2021. 2021A. 362-362
井口航平, 岩崎渉, 上原雅人, 大曲新矢, 本村大成, 森田伸友, 伊藤高廣, 村上直. AlN膜の結晶性と弾性表面波デバイスの特性に関する研究. 精密工学会学術講演会講演論文集. 2021. 2021A. 360-361
井上賢人, 是澤宏之, 楢原弘之, 石田秀一, 本村大成, 田原竜夫. 切削中のAE信号と機械学習を用いた加工状態の観察に関する研究. 精密工学会学術講演会講演論文集. 2021. 2021S. 368-369
Motomura Taisei, Tabaru Tatsuo, Uehara Masato. Low temperature deposition of c-axis oriented gallium nitride films using high-density convergent plasma sputtering device. Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science. 2021. 2021. 2Ca09Y
Plasma Sputtering Using Liquid Metal Target. プラズマ・核融合学会誌 = Journal of plasma and fusion research. 2020. 96. 12. 695-700

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Patents (5)：

Education (4)：

2009 - 2012 Kyushu University Interdisciplinary Graduate School of Engineering Sciences Department of Advanced Energy Engineering Science
2007 - 2009 Kyushu University Interdisciplinary Graduate School of Engineering Sciences Department of Advanced Energy Engineering Science
2005 - 2007 Institute of National Colleges of Technology, Japan
2000 - 2005 Institute of National Colleges of Technology, Japan

Work history (3)：

2016/10 - 現在 National Institute of Advanced Industrial Science and Technology
2012/04 - 2016/09 National Institute of Advanced Industrial Science and Technology
2010/04 - 2012/03 Japan Society for the Promotion of Science

Committee career (6)：

2023/04 - 2025/03 一般社団法人エレクトロニクス実装学会学会誌編集委員
2023/04 - 2025/03 一般社団法人エレクトロニクス実装学会官能検査システム化研究会主査
2022/04 - 2025/03 公益社団法人日本表面真空学会スパッタリングおよびプラズマプロセス技術部会(SP部会) 幹事
2023/04 - 2024/03 公益社団法人応用物理学会プラズマエレクトロニクス分科会アカデミックロードマップ改訂WGメンバー
2020/07 - 2022/06 一般社団法人プラズマ・核融合学会学会誌編集委員

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Awards (3)：

2024/04 - 一般社団法人エレクトロニクス実装学会第37回エレクトロニクス実装学会春季講演大会優秀賞
2022/05 - 公益社団法人日本表面真空学会講演奨励賞(若手研究者部門)
2016/11 - 一般社団法人日本真空学会第25回真空進歩賞

Association Membership(s) (4)：

The Japan Sociey of Applied Physics , The Japan Society of Vacuum and Surface Science , エレクトロニクス実装学会 , The Japan Society of Plasma Science and Nuclear Fusion Research

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