Rchr
J-GLOBAL ID:200901035239671035
Update date: Sep. 19, 2024
Ikenoue Hiroshi
イケノウエ ヒロシ | Ikenoue Hiroshi
Affiliation and department:
Job title:
Designated Professor
Homepage URL (1):
https://www.kochi-tech.ac.jp/profile/ja/ikenoue-hiroshi.html
Research field (4):
Crystal engineering
, Applied materials
, Thin-film surfaces and interfaces
, Optical engineering and photonics
Research keywords (5):
光・量子を活用した産学官共創社会実装拠点の構築
, Laser Processing
, Semiconductor Devices
, Nano-Materials
, Artificial Intelligence
Research theme for competitive and other funds (8):
- 2021 - 2025 電動車両用駆動モータのステータの量産を可能とする平角銅線のAI制御高速、高品質レーザ溶接加工装置の開発
- 2020 - 2023 CPS化戦略の波及加速パイロット拠点の形成
- 2016 - 2019 Fabrication of doped ZnO spherical crystals by optical vortex laser processing
- 2019 - 2019 CPS型材料改質レーザー加工システムの試作と評価
- 2013 - 2016 Study on high-speed doping mechanism of wet laser processing
- 2008 - 2008 水中レーザー照射法を用いた半導体デバイスプロセス技術開発
- 2006 - 2006 水中レーザー加工動的挙動の解明と半導体デバイス製造技術への応用
- 2005 - 2005 低損傷レーザー加工技術の開発と半導体デバイス製造技術への応用
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Papers (151):
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Tetsuya Goto, Tomoyuki Suwa, Keita Katayama, Shu Nishida, Hiroshi Ikenoue, Shigetoshi Sugawa. Threshold voltage uniformity improvement by introducing charge injection tuning for low-temperature poly-Si thin film transistors with metal/oxide/nitride/oxide/silicon structure. Japanese Journal of Applied Physics. 2024. 63. 2. 02SP51-02SP51
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Y. Katamune, K. Murasawa, T. Yoshitake, T. Kikuchi, K. Imokawa, H. Ikenoue. Low-volume-loss surface polishing with a krypton fluoride excimer laser for polycrystalline diamond films. Applied Physics Letters. 2023. 123. 3
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Keita Katayama, Hiroshi Ikenoue, Taizoh Sadoh. Modulation of Schottky barrier at metal/Ge contacts by phosphoric acid coating and excimer laser annealing. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING. 2023. 160
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Takuma Yasunami, Daisuke Nakamura, Keita Katayama, Yoshiaki Kakimoto, Toshifumi Kikuchi, Hiroshi Ikenoue. Laser doping mechanism of 4H-SiC by KrF excimer laser irradiation using SiNx thin films. JAPANESE JOURNAL OF APPLIED PHYSICS. 2023. 62. SC
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Yoshiaki Kakimoto, Keita Katayama, Takuma Yasunami, Tetsuya Goto, Daisuke Nakamura, Hiroshi Ikenoue. Excimer laser doping for the fabrication of 4H-SiC power devices. Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII. 2023
more...
MISC (51):
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後藤哲也, 後藤哲也, 諏訪智之, 諏訪智之, 片山慶太, 西田脩, 池上浩, 須川成利. Threshold Voltage Control of MONOS-Type LTPS TFTs. 応用物理学会秋季学術講演会講演予稿集(CD-ROM). 2023. 84th
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青木蓮, 片山慶太, 中村大輔, 薮田久人, 池上浩, 佐道泰造. Ultra-high concentration p+n junctions by excimer laser doping. 応用物理学会秋季学術講演会講演予稿集(CD-ROM). 2023. 84th
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中村 大輔, 藤本 翼, 東畠 三洋, 池上 浩. 光渦パルスによる半導体、金属のマイクロ加工-Microprocessing of semiconductor and metal by optical vortex pulse-次世代レーザー加工. レーザー学会研究会報告 = Reports the on topical meeting of the Laser Society of Japan. 2021. RTM21. 20-24. 7-11
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池上 浩. CPS化戦略の波及加速パイロット拠点の形成-Establishment of a Pilot Center to Enhance the Social Effect of Cyber-Physical Systems-特集 内閣府SIPにおける光・量子を活用したSociety5.0実現化技術. Optronics : 光技術コーディネートジャーナル. 2021. 40. 9. 81-85
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Si ablation by nanosecond optical vortex laser pulse. 2020. 20. 6. 23-27
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Patents (90):
Professional career (1):
Work history (6):
Association Membership(s) (4):
レーザ加工学会
, THE LASER SOCIETY OF JAPAN
, THE JAPAN SOCIETY OF APPLIED PHYSICS
, IEEE
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