Rchr
J-GLOBAL ID：200901039358406230
Update date: Apr. 02, 2024
Ito Hiroshi
イトウ ヒロシ | Ito Hiroshi
Affiliation and department：
Homepage URL (1)：
http://www.tokyo-ct.ac.jp
Research field (2)：
Electric/electronic material engineering
, Thin-film surfaces and interfaces
Research keywords (5)：
MEMS sensor
, 電子デバイス
, 電子物性
, Semiconductor device
, Thin film of semiconductor materials
Research theme for competitive and other funds (3)：
- 2000 - 2002 Low-temperature heteroepitaxy of compound semiconductors on silicon substrate
- 化合物半導体薄膜の低温結晶成長とプラズマプロセスに関する研究
- Deposition techniqcee and estimation of compouid Semiconductor materials
Papers (27)：
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Yoshio Kawamata, Daisuke Ono, Hiroshi Ito, Hiroyuki Nikkuni, Mikio Ito. Film structure and optical characteristics of a-Si:H prepared with a rotary table type layer-by-layer sputtering method for application in short-wave near-infrared filters. Optical Materials Express. 2022. 12. 11. 4223-4234
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Hiroshi Ito, Kaito Sakamoto, Syosuke Sato, Yoshio Kawamata, Hiroyuki Nikkuni. Investigation of MEMS Process using SiON Film Deposited by Reactive Sputtering. IEEJ Transactions on Sensors and Micromachines. 2022. 142. 10. 273-277
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Yoshio Kawamata, Hiroshi Ito, Hiroyuki Nikkuni, Mikio Ito. Substrate Potential Dependence of Optical Characteristics of a-Si:H for Shortwave Near-infrared Filter by DC and RF Sputtering. e-Journal of Surface Science and Nanotechnology. 2022. 20. 2. 68-75
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Yoshio KAWAMATA, Hiroshi ITO, Hiroyuki NIKKUNI, Mikio ITO. Deposition Temperature Dependence of Optical Properties of a-Si:H for Short-wave Near-infrared Filter by DC Sputtering. Vacuum and Surface Science. 2021. 64. 8. 375-381
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Hiroyuki Nikkuni, Chizuru Numata, Ryoto Yamaji, Hiroshi Ito, Yoshio Kawamata. Transparency Improvement of SiCO Thin Film for Optical Waveguide with Reactive Sputtering Method. IEEJ Transactions on Sensors and Micromachines. 2020. 140. 12. 369-373
ｍore...
MISC (24)：
Books (2)：
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Advanced Materials in Electronics
Research Signpost 全304頁 2004
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工業材料(特集 高機能を付加する成膜技術最前線)
日刊工業新聞社 全112頁 2001
Lectures and oral presentations (36)：
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Si積層による光導波型SPR血糖値センサの高感度化の実験的考察~EB蒸着Si膜における感度の膜厚依存性~
(第40回「センサマイクマシンと応用システム」シンポジウム 2023)
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アニール処理による光導波路用 SiCO 薄膜の透明性の改善
(第40回「センサマイクマシンと応用システム」シンポジウム 2023)
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Study of fabrication process of thermal MEMS flow sensor using TiN micro-heater
(2023)
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Fabrication and evaluation of MEMS pressure sensor used by sputtered SiON film
(The 39th sensor symposium on sensors, micromachines and applied systems 2022)
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Experimental Consideration on Gas Pressure Dependence of Optical and Mechanical Properties in a SiCO Thin Film for Optical Waveguide by Reactive Sputtering Method
(The 39th sensor symposium on sensors, micromachines and applied systems 2022)
ｍore...
Works (2)：
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樹脂材料表面上への気相反応を用いた薄膜形成技術の研究
2010 -
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電気的特性評価試験及び表面形状評価試験、電気的特性評価技術の確立に関する技術指導(ものづくり中小企業製品開発等支援補助金)
2009 -
Professional career (2)：
Work history (4)：
- 2020/04 - 現在 Tokyo National College of Technology Department of Electrical Engineering Professor
- 2007/04 - 2020/03 Tokyo National College of Technology Department of Electrical Engineering
- 2000/04 - 2006/03 Tokyo National College of Technology Department of Electrical Engineering
- 1999/04 - 2000/03 The University of Tokyo VLSI (Very Scale Integration Large) Design and Education Center
Awards (1)：
- 1999 - 最優秀(論文)賞(ICMTS国際会議)
Association Membership(s) (4)：
THE VACUUM SOCIETY OF JAPAN
, THE SURFACE SCIENCE SOCIETY OF JAPAN
, 日本MRS学会
, 応用物理学会
