Art
J-GLOBAL ID:200902035803965102
Reference number:87A0244403
The microstructure of sputter-deposited coatings.
スパッタリングで蒸着した被覆膜の微細構造
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Author (1):
Material:
Volume:
4
Issue:
6
Page:
3059-3065
Publication year:
Nov. 1986
JST Material Number:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
Document type:
Article
Article type:
解説
Country of issue:
United States (USA)
Language:
ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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JST classification (2):
JST classification
Category name(code) classified by JST.
Metallic thin films
, Irradiational changes in properties and structures in general
Terms in the title (4):
Terms in the title
Keywords automatically extracted from the title.
,
,
,
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