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J-GLOBAL ID:200902035803965102   Reference number:87A0244403

The microstructure of sputter-deposited coatings.

スパッタリングで蒸着した被覆膜の微細構造
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Volume:Issue:Page: 3059-3065  Publication year: Nov. 1986 
JST Material Number: C0789B  ISSN: 0734-2101  CODEN: JVTAD6  Document type: Article
Article type: 解説  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Metallic thin films  ,  Irradiational changes in properties and structures in general 
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