Art
J-GLOBAL ID：200902093265479383
Reference number：87A0253387
Morphology and properties of sputtered (Ti,Al)N layers on high speed steel substrates as a function of deposition temperature and sputtering atmosphere.
高速度鋼基板にスパッタリングで付けた(Ti,Al)N膜の表面形態と諸性質に及ぼす蒸着温度とスパッタリングふん囲気の影響
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Author (4)：
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Material：
Volume：
4
Issue：
6
Page：
2701-2705
Publication year：
Nov. 1986
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds
, Ceramic coating to metallic materials
Terms in the title (8)：
Terms in the title
Keywords automatically extracted from the title.
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