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J-GLOBAL ID:200902104913842490   Reference number:97A0732745

Preferential Orientation of Titanium Dioxide Polycrystalline Films Using Atmospheric CVD Technique.

常圧CVD法による二酸化チタン多結晶膜の優先配向
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Volume: 105  Issue:Page: 551-554  Publication year: Jul. 1997 
JST Material Number: F0382A  ISSN: 0914-5400  CODEN: JCSJEW  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Oxide thin films 
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