Art
J-GLOBAL ID:200902113099996006
Reference number:97A0262609
Large-Area Optical Proximity Correction with a Combination of Rule-Based and Simulation-Based Methods.
ルールに基づく方法とシミュレーションに基づく方法を組合わせた大面積光学近接補正
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Author (3):
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Material:
Volume:
35
Issue:
12B
Page:
6370-6373
Publication year:
Dec. 1996
JST Material Number:
G0520B
ISSN:
0021-4922
Document type:
Article
Article type:
原著論文
Country of issue:
Japan (JPN)
Language:
ENGLISH (EN)
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JST classification (1):
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
Reference (5):
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OTTO, O. W. Proc.SPIE. 1994, 2197, 278
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SPENCE, C. A. Proc.SPIE. 1994, 2197, 302
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RIEGER, M. L. Proc.SPIE. 1994, 2197, 371
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LIEBMANN, L. W. Proc.SPIE. 1994, 2322, 229
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MIMOTOGI, S. Dig.Pap.MicroProcess'95. 1995, 38
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