Art
J-GLOBAL ID：200902133096318920
Reference number：01A0486694
Near-Field Distribution of Radial Line Slot Antenna for Surface-Wave-Coupled Plasma Generation.
表面波結合プラズマ発生のためのラジアルラインスロットアンテナの近傍場分布
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Author (6)：
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Material：
Volume：
40
Issue：
1
Page：
380-387
Publication year：
Jan. 15, 2001
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Antennas
, Plasma production and heating
Reference (17)：
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1) T. Yoshiki, K. Ono and K. Komachi: Ext. Abstr. (Fall Meet. 1994) Japan Society of Applied Physics 20a-ZM-8 [in Japanese].
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2) H. Mabuchi, K. Katayama, K. Ito, K. Komachi and T. Ebata: Ext. Abstr. (Fall Meet. 1994) Japan Society of Applied Physics 20a-ZM-9 [in Japanese].
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3) T. Akimoto and E. Ikawa: Ext. Abstr. (Fall Meet. 1994) Japan Society of Applied Physics 20a-ZM-10 [in Japanese].
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4) M. Nagatsu, S. Morita, I. Ghanashev, A. Ito, N. Toyoda and H. Sugai: Appl. Phys. 33 (2000) 1143.
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5) M. Tuda, K. Ono, H. Ootera, M. Tsuchihashi, M. Hanazaki and T. Komemura: J. Vac. Sci. Technol. A 18 (2000) 840.
ｍore...
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