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J-GLOBAL ID:200902144440420811   Reference number:99A0999466

Microstructural Observation of Boron Nitride Films Synthesized by Ion Implantation.

イオン注入により合成した窒化ほう素薄膜の微細構造の観察
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Volume: 38  Issue: 10  Page: 6054-6057  Publication year: Oct. 15, 1999 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds 
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