Art
J-GLOBAL ID:200902144440420811
Reference number:99A0999466
Microstructural Observation of Boron Nitride Films Synthesized by Ion Implantation.
イオン注入により合成した窒化ほう素薄膜の微細構造の観察
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Author (4):
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Material:
Volume:
38
Issue:
10
Page:
6054-6057
Publication year:
Oct. 15, 1999
JST Material Number:
G0520B
ISSN:
0021-4922
Document type:
Article
Article type:
原著論文
Country of issue:
Japan (JPN)
Language:
ENGLISH (EN)
Thesaurus term:
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JST classification (1):
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds
Terms in the title (5):
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