Art
J-GLOBAL ID：200902144440420811
Reference number：99A0999466
Microstructural Observation of Boron Nitride Films Synthesized by Ion Implantation.
イオン注入により合成した窒化ほう素薄膜の微細構造の観察
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Author (4)：
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Material：
Volume：
38
Issue：
10
Page：
6054-6057
Publication year：
Oct. 15, 1999
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
Thesaurus term：
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds
Terms in the title (5)：
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