Microstructure and electrical properties of CoN<sub>x</sub> thin films deposited by unbalanced magnetron sputtering.

ASAHARA H; MIGITA T; TANAKA T; KAWABATA K

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J-GLOBAL ID：200902197274103299 Reference number：01A0646338

Microstructure and electrical properties of CoN_x thin films deposited by unbalanced magnetron sputtering.

非平衡マグネトロンスパッタリングにより堆積したCoN_x薄膜の微細構造と電気特性

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Volume： 62 Issue： 2/3 Page： 293-296 Publication year： Jun. 15, 2001
JST Material Number： E0347A ISSN： 0042-207X Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Thin films of other inorganic compounds , Electric conduction in other inorganic compounds

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Microstructure and electrical properties of CoNx thin films deposited by unbalanced magnetron sputtering.

Microstructure and electrical properties of CoN_x thin films deposited by unbalanced magnetron sputtering.