Art
J-GLOBAL ID：200902199458274471
Reference number：97A0775356
Atomic Force Microscope Nanolithography on SiO2/Semiconductor Surfaces.
SiO2/半導体表面上での原子間力顕微鏡ナノリソグラフィー
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Author (3)：
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Material：
Volume：
36
Issue：
6B
Page：
4057-4060
Publication year：
Jun. 1997
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
Thesaurus term：
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
Terms in the title (4)：
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