Art

J-GLOBAL ID：200902203152357184   Reference number：04A0543849

Step-and-Repeat Photo-Nanoimprint System Using Active Orientation Head

能動配向ヘッドを用いたステップアンドレピートの光ナノインプリントシステム

Author (5)： HIROSHIMA H (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  KOMURO M (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  KURASHIMA Y (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  KIM S H (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  MUNEISHI T (Kyocera Corp., Shiga, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 43  Issue： 6B  Page： 4012-4016  Publication year： Jun. 30, 2004 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *photolithography ,...
Semi thesaurus term： head ,...

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JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Reference (11)：

• 1) S. Y. Chou, P. R. Krauss and P. J. Renstrom: Appl. Phys. Lett. 67 (1995) 3114.
• 2) S. Y. Chou, P. R. Krauss, W. Zhang, L. Guo and L. Zhuang: J. Vac. Sci. & Technol. B <B>15</B> (1997) 2897.
• 3) Y. Kurahima, M. Komuro, H. Hiroshima, J. Taniguchi and I. Miyamoto: Jpn. J. Appl. Phys. 42 (2003) 3871.
• 4) W. Zhang and S. Y. Chou: Appl. Phys. Lett. 83 (2003) 1632.
• 5) T. Haatainen, J. Ahopelto, G. Gruetzner, M. Fink and K. Pfeiffer: Proc. SPIE 3997 (2001) 874.

Terms in the title (2)： 配向 ,  光ナノインプリント