Improvements of Frictional Properties of B-C Sputtered Thin Films by CH<sub>4</sub> Gas Introduction

KOZAKI MASAO

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J-GLOBAL ID：200902204409784778 Reference number：07A0380515

Improvements of Frictional Properties of B-C Sputtered Thin Films by CH₄ Gas Introduction

メタンガス導入による炭化ホウ素系スパッタ薄膜の摩擦特性向上

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Volume： 52 Issue： 4 Page： 303-309 Publication year： Apr. 15, 2007
JST Material Number： F0390A ISSN： 0915-1168 CODEN： TORAEO Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Techniques and equipment of thin film deposition , Lubrication in general

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Improvements of Frictional Properties of B-C Sputtered Thin Films by CH4 Gas Introduction

Improvements of Frictional Properties of B-C Sputtered Thin Films by CH₄ Gas Introduction