Improvement of Crystal Quality of n-AlGaN by Alternate-Source-Feeding Metal Organic Vapor Phase Epitaxy

ISONO Ken-ichi; NIIKURA Eiichiro; MURAKAWA Koichi; HASEGAWA Fumio; KAWANISHI Hideo

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J-GLOBAL ID：200902207543928874 Reference number：07A0953265

Improvement of Crystal Quality of n-AlGaN by Alternate-Source-Feeding Metal Organic Vapor Phase Epitaxy

原料交互供給型有機金属気相エピタキシャル法によって成長させたn-AlGaNの結晶性の改善

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Material：
Volume： 46 Issue： 9A Page： 5711-5714 Publication year： Sep. 15, 2007
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Electric conduction in other inorganic compounds

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