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J-GLOBAL ID:200902225993631683   Reference number:03A0525449

Lines of periodic hole structures produced by laser ablation using interfering femtosecond lasers split by a transmission grating

透過型回折格子によって分岐されたフェムト秒レーザの干渉を用いたアブレーションによる周期的穴ライン構造
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Volume: 77  Issue: 3/4  Page: 399-401  Publication year: Aug. 2003 
JST Material Number: D0256C  ISSN: 0947-8396  CODEN: APHYCC  Document type: Article
Article type: 原著論文  Country of issue: Germany, Federal Republic of (DEU)  Language: ENGLISH (EN)
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Laser irradiation effects and damages  ,  Manufacturing technology of solid-state devices 
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