Art
J-GLOBAL ID:200902225993631683
Reference number:03A0525449 Lines of periodic hole structures produced by laser ablation using interfering femtosecond lasers split by a transmission grating
透過型回折格子によって分岐されたフェムト秒レーザの干渉を用いたアブレーションによる周期的穴ライン構造
Author (3):
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Material: Volume:
77
Issue:
3/4
Page:
399-401
Publication year:
Aug. 2003
JST Material Number:
D0256C
ISSN:
0947-8396
CODEN:
APHYCC
Document type:
Article
Article type:
原著論文
Country of issue:
Germany, Federal Republic of (DEU)
Language:
ENGLISH (EN)
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JST classification (2): JST classification
Category name(code) classified by JST.
Laser irradiation effects and damages
, Manufacturing technology of solid-state devices
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Keywords automatically extracted from the title.
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