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J-GLOBAL ID:200902226328587629   Reference number:06A0049792

Study on Laser Direct Bonding of Silicon and Glass

シリコンとガラスのレーザ直接接合
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Volume: 72  Issue:Page: 111-115  Publication year: Jan. 05, 2006 
JST Material Number: F0268B  ISSN: 1348-8716  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices 
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