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J-GLOBAL ID:200902233007916805   Reference number:05A1021580

A Practical Method for Compensating Surface Inclination Effect on Optical Stylus Profile Measurement

光触針式輪郭測定における傾斜測定誤差の補正法
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Volume: 71  Issue:Page: 590-594  Publication year: May. 05, 2005 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Optical instruments and techniques in general 
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