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J-GLOBAL ID:200902254617190870   Reference number:04A0543856

Fabrication of Low Line Edge Roughness Mold for Photo-Nanoimprint

フォトナノインプリント用低ライン端粗さのモールド製作
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Volume: 43  Issue: 6B  Page: 4045-4049  Publication year: Jun. 30, 2004 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 
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