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J-GLOBAL ID：200902259511610023
Reference number：04A0849210 New etching process for device fabrication using diamond
ダイヤモンドを用いたデバイス作製のための新しいエッチングプロセス
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HWANG D S
About HWANG D S
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
, About National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN
SAITO T
About SAITO T
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
, About National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN
FUJIMORI N
About FUJIMORI N
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
About National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN
Material：
Diamond and Related Materials
(Diam Relat Mater)
About Diamond and Related Materials
Volume： 13 Issue： 11/12 Page： 2207-2210 Publication year： Nov. 2004
JST Material Number： W0498A ISSN： 0925-9635 Document type： Article
Article type： 原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)
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On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*plasma etching
,...
About plasma etching
JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
Category name(code) classified by JST.
(NC03030V)
About Manufacturing technology of solid-state devices
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Keywords automatically extracted from the title.
ダイヤモンド
, About ダイヤモンド
作製
, About 作製
エッチングプロセス
About エッチングプロセス
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