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J-GLOBAL ID:200902260187035930   Reference number:03A0336555

Development of Phase-Shifting Point Diffraction Interferometry with Fiber Point Sources

光ファイバからの点光源回折球面波を計測の絶対基準とした位相シフト光干渉計の開発
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Volume: 69  Issue:Page: 678-682  Publication year: May. 05, 2003 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Interferometry and interferometers  ,  Measuring methods and instruments of length,area,cross section,volume,angle 
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