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J-GLOBAL ID：200902275535506192
Reference number：08A1260283 Characteristics of Three-Dimensional Resonant Vibration in a MEMS Silicon Beam Resonator
MEMSシリコン梁型共振器の3次元共振特性
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ISHINO Takuya
About ISHINO Takuya
(Ritsumeikan Univ., Shiga, JPN)
, About Ritsumeikan Univ., Shiga, JPN
MAKITA Sho
About MAKITA Sho
(Ritsumeikan Univ., Shiga, JPN)
, About Ritsumeikan Univ., Shiga, JPN
TANIGAWA Hiroshi
About TANIGAWA Hiroshi
(Ritsumeikan Univ., Shiga, JPN)
, About Ritsumeikan Univ., Shiga, JPN
SUZUKI Kenichiro
About SUZUKI Kenichiro
(Ritsumeikan Univ., Shiga, JPN)
About Ritsumeikan Univ., Shiga, JPN
Material：
Proceedings of the Sensor Symposium on Sensors, Micromachines, and Applied Systems
(Proceedings of the Sensor Symposium)
About Proceedings of the Sensor Symposium on Sensors, Micromachines, and Applied Systems
Volume： 25th Page： 551-556 Publication year： Oct. 22, 2008
JST Material Number： X0768A Document type： Proceedings
Article type： 原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*MEMS
, About MEMS
*silicon
, About silicon
*resonator
, About resonator
micromachining
, About micromachining
oscillation mode
, About oscillation mode
*resonance frequency
, About resonance frequency
frequency characteristic
About frequency characteristic
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
梁型共振器
About 梁型共振器
JST classification (2)：
JST classification
Category name(code) classified by JST.
Resonator
Category name(code) classified by JST.
(NC04050Y)
, Manufacturing technology of solid-state devices
About Resonator
(NC03030V)
About Manufacturing technology of solid-state devices
Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
Keywords automatically extracted from the title.
MEMS
, About MEMS
シリコン
, About シリコン
梁
, About 梁
共振器
, About 共振器
3次元
, About 3次元
共振特性
About 共振特性
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