Art
J-GLOBAL ID：200902277776622773   Reference number：03A0571351

N-Channel MOSFETs Fabricated on Homoepitaxy-Grown 3C-SiC Films

ホモエピタクシー成長3C-SiC膜上に作製したNチャネルMOSFET
Author (9)：
LEE K K

About LEE K K

(Japan Atomic Energy Res. Inst., Gunma, JPN)

About Japan Atomic Energy Res. Inst., Gunma, JPN

, 
ISHIDA Y

About ISHIDA Y

(National Inst. Advanced Industrial Sci. and Technol., Ibaraki, JPN)

About National Inst. Advanced Industrial Sci. and Technol., Ibaraki, JPN

, 
OHSHIMA T

About OHSHIMA T

(Japan Atomic Energy Res. Inst., Gunma, JPN)

About Japan Atomic Energy Res. Inst., Gunma, JPN

, 
KOJIMA K

About KOJIMA K

(National Inst. Advanced Industrial Sci. and Technol., Ibaraki, JPN)

About National Inst. Advanced Industrial Sci. and Technol., Ibaraki, JPN

, 
TANAKA Y

About TANAKA Y

(National Inst. Advanced Industrial Sci. and Technol., Ibaraki, JPN)

About National Inst. Advanced Industrial Sci. and Technol., Ibaraki, JPN

, 
TAKAHASHI T

About TAKAHASHI T

(National Inst. Advanced Industrial Sci. and Technol., Ibaraki, JPN)

About National Inst. Advanced Industrial Sci. and Technol., Ibaraki, JPN

, 
OKUMURA H

About OKUMURA H

(National Inst. Advanced Industrial Sci. and Technol., Ibaraki, JPN)

About National Inst. Advanced Industrial Sci. and Technol., Ibaraki, JPN

, 
ARAI K

About ARAI K

(National Inst. Advanced Industrial Sci. and Technol., Ibaraki, JPN)

About National Inst. Advanced Industrial Sci. and Technol., Ibaraki, JPN

, 
KAMIYA T

About KAMIYA T

(Japan Atomic Energy Res. Inst., Gunma, JPN)

About Japan Atomic Energy Res. Inst., Gunma, JPN


Material：
IEEE Electron Device Letters  (IEEE Electron Device Lett)

About IEEE Electron Device Letters


Volume： 24  Issue： 7  Page： 466-468  Publication year： Jul. 2003 
JST Material Number： B0344B  ISSN： 0741-3106  CODEN： EDLEDZ  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*MOSFET

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,...
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Thesaurus term/Semi thesaurus term
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trap(solid)

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,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Transistors 
(NC03070N)

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Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
ホモ

About ホモ

, 
エピタクシー成長

About エピタクシー成長

, 
3C-SiC

About 3C-SiC

, 
作製

About 作製

, 
nチャネルMOSFET

About nチャネルMOSFET


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