Art
J-GLOBAL ID:200902277776622773   Reference number:03A0571351

N-Channel MOSFETs Fabricated on Homoepitaxy-Grown 3C-SiC Films

ホモエピタクシー成長3C-SiC膜上に作製したNチャネルMOSFET
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Volume: 24  Issue:Page: 466-468  Publication year: Jul. 2003 
JST Material Number: B0344B  ISSN: 0741-3106  CODEN: EDLEDZ  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Transistors 
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