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J-GLOBAL ID:200902285529990215   Reference number:05A0995589

Effect of rapid sample cooling on efficiency of multiple impurity-atom doping

多重不純物原子ドーピングに及ぼす急速試料冷却の影響
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Volume: 14  Issue: 11-12  Page: 2039-2042  Publication year: Nov. 2005 
JST Material Number: W0498A  ISSN: 0925-9635  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 
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