Behavior of Local Charge-Trapping Sites in La2O3-Al2O3 Composite Films under Constant Voltage Stress

SAGO Toshifumi; SEKO Akiyoshi; SAKASHITA Mitsuo; SAKAI Akira; OGAWA Masaki; ZAIMA Shigeaki

Art

J-GLOBAL ID：200902291951022990 Reference number：07A0478778

Behavior of Local Charge-Trapping Sites in La₂O₃-Al₂O₃ Composite Films under Constant Voltage Stress

一定の電圧の印加されたLa₂O₃-Al₂O₃によって構成される複合薄膜における局所的な電荷捕獲サイトの振る舞い

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Material：
Volume： 46 Issue： 4B Page： 1879-1884 Publication year： Apr. 30, 2007
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Dielectrics in general

Reference (19)：

R. O’Connor, G. Hughes, R. Degraeve, and B. Kaczer: Microelectron. Eng.77(2005)302.
F. Lime, K. Oshima, M. Cassé, G. Ghibaudo, S. Cristoloveanu, B. Guillaumot, and H. Iwai: Solid-State Electron.47(2003)1617.
S. Rhee and J. Lee: Microelectron. Reliab.45(2005)1051.
N. Novkovski and E. Atanassova: Appl. Surf. Sci.252(2006)3833.
C. Zhao, M. Zahid, J. Zhang, G. Groeseneken, R. Degraeve, and S. Gendt: Microelectron. Eng.80(2005)366.

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