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J-GLOBAL ID：200906081680600208

sputtered iridium oxide film

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Synonyms (1)：

sputtered iridium oxide film (SIROF)
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Related terms (2)：

iridium oxide (酸化イリジウム)
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sputtered deposition (スパッタ蒸着)
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Broader terms (2)：

evaporated film (蒸着膜)
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oxide film (酸化膜)
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