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J-GLOBAL ID:201002289397991493   Reference number:10A0456335

Disturbance Compensation of Pneumatic Isolation Table Using Pressure Differentiator

圧力微分計を用いた空気ばね式除振台の外乱補償制御
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Volume: 76  Issue: 764  Page: 861-868  Publication year: Apr. 25, 2010 
JST Material Number: F0045B  ISSN: 0387-5024  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Propagation of vibrations 
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