Art
J-GLOBAL ID：201002292824359281   Reference number：10A0686601

Electrical and optical properties of Nb-doped TiO2 films deposited by dc magnetron sputtering using slightly reduced Nb-doped TiO2-x ceramic targets

僅かに還元されたNbドープTiO2-xセラミックターゲットを用いたdcマグネトロンスパッタリングにより堆積したNbドープTiO2膜の電気的及び光学的性質
Author (6)：
SATO Yasushi

About SATO Yasushi

(Graduate School of Sci. and Engineering, Aoyama Gakuin Univ., 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, JPN)

About Graduate School of Sci. and Engineering, Aoyama Gakuin Univ., 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, JPN

, 
SANNO Yuta

About SANNO Yuta

(Graduate School of Sci. and Engineering, Aoyama Gakuin Univ., 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, JPN)

About Graduate School of Sci. and Engineering, Aoyama Gakuin Univ., 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, JPN

, 
TASAKI Chihiro

About TASAKI Chihiro

(Graduate School of Sci. and Engineering, Aoyama Gakuin Univ., 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, JPN)

About Graduate School of Sci. and Engineering, Aoyama Gakuin Univ., 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, JPN

, 
OKA Nobuto

About OKA Nobuto

(Graduate School of Sci. and Engineering, Aoyama Gakuin Univ., 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, JPN)

About Graduate School of Sci. and Engineering, Aoyama Gakuin Univ., 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, JPN

, 
KAMIYAMA Toshihisa

About KAMIYAMA Toshihisa

(AGC Ceramics Co. Ltd., 5-6-1 Umei, Takasago, Hyogo 676-8655, JPN)

About AGC Ceramics Co. Ltd., 5-6-1 Umei, Takasago, Hyogo 676-8655, JPN

, 
SHIGESATO Yuzo

About SHIGESATO Yuzo

(Graduate School of Sci. and Engineering, Aoyama Gakuin Univ., 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, JPN)

About Graduate School of Sci. and Engineering, Aoyama Gakuin Univ., 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, JPN


Material：
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)

About Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films


Volume： 28  Issue： 4  Page： 851  Publication year： Jul. 2010 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*titanium oxide

About titanium oxide

, 
*niobium

About niobium

, 
*doping

About doping

, 
anatase-type crystal

About anatase-type crystal

, 
magnetron sputtering

About magnetron sputtering

, 
sputtered deposition

About sputtered deposition

, 
crystallization

About crystallization

, 
polycrystal

About polycrystal

, 
*electrical resistivity

About electrical resistivity

, 
carrier density

About carrier density

, 
Hall mobility

About Hall mobility

, 
*transparent conducting thin films

About transparent conducting thin films

, 
*transmissivity

About transmissivity

, 
optical constant

About optical constant

, 
glass substrate

About glass substrate


JST classification (3)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

,  Electric conduction in crystalline semiconductors 
(BM03043X)

About Electric conduction in crystalline semiconductors

,  Optical properties of condensed matter in general 
(BM08010A)

About Optical properties of condensed matter in general

Terms in the title (9)：
Terms in the title
Keywords automatically extracted from the title.
還元

About 還元

, 
Nb

About Nb

, 
ドープ

About ドープ

, 
TiO2

About TiO2

, 
セラミック

About セラミック

, 
ターゲット

About ターゲット

, 
DCマグネトロンスパッタリング

About DCマグネトロンスパッタリング

, 
堆積

About 堆積

, 
光学的性質

About 光学的性質


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