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J-GLOBAL ID:201202246475019772   Reference number:12A1636373

先端電子デバイスの量産を支える超精密研磨技術 触媒表面基準エッチングによる単結晶SiC,GaN表面の平滑化

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Volume: 78  Issue: 11  Page: 947-951  Publication year: Nov. 05, 2012 
JST Material Number: F0268C  ISSN: 0912-0289  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Special machining  ,  Manufacturing technology of solid-state devices 
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